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0102030405
Nitrogen Trifluoride
Product Name: Nitrogen Trifluoride
Abbreviation Abbreviation: Nf3
Synonyms: N,N,N-Trifluoroamine;Nf3;Nitrogenfluoride(Nf3);Perfluoroammonia;Stickstoff(Iii)-Fluorid;Stickstofftrifluorid; Trifluoroamine
CAS: 773-54-2 _
Molecular formula Chemical formula: F3N
Molecular weightMolecular weight: 71
Einecs: 232-007-1
Structural formula: 
BRIEF DESCRIPTION
Nitrogen trifluoride (NF3) is a colorless, odorless, stable gas and a strong oxidant. The melting point of nitrogen trifluoride is -206.8℃, the boiling point is -129.0℃, and it is insoluble in water.
TECHNICAL INDICATORS
Analysis |
Requirement |
Exterior |
colorless gas |
purity% |
99.996 |
Carbon tetrafluoride (CF4) |
20 |
Water (H2O) |
1 |
Purpose (USE)
Nitrogen trifluoride can be used as a fluorine source for high-energy chemical laser gas, and as an etchant for semiconductor materials such as polysilicon, silicon nitride, and tungsten silicide. It can also be used as a cleaning agent for chemical vapor deposition chambers and LCD panels in semiconductor chip production. Nitrogen trifluoride is used as a CVD box cleaning agent. Compared with perfluorocarbons, it can reduce pollutant emissions by about 90%, and It can significantly increase the cleaning speed and improve the cleaning ability.
Packaging/storage conditions (STORAGE CONDITIONS)
Nitrogen trifluoride is filled in seamless steel cylinders with volumes of 8L, 40L, 43.3L, and 47L respectively. Specific packaging specifications can be customized and changed according to user needs.
CHEMICAL PROPERTIES
1.Nitrogen trifluoride is a highly corrosive gas that is harmful to skin, eyes and respiratory tract.
2. It is a stable compound and not easy to burn or explode.
3. At normal temperature, nitrogen trifluoride is colorless and odorless, but it may appear lavender at higher temperatures.
4. It is soluble in water and reacts with some metals (such as aluminum) to form fluoride.
5. Nitrogen trifluoride is denser and heavier than air, and easily accumulates in lower places.
Safety information:
1. Nitrogen trifluoride is harmful to the human body. Contact with the skin and inhalation of its vapor can cause chemical burns and other health problems.
2. Wear appropriate protective equipment, such as respirators, chemical goggles and protective clothing when using nitrogen trifluoride.
3. It is a strong gas oxidant and can react violently with flammable substances, so it needs to be kept away from flammable materials.
4. Relevant safety regulations must be followed when storing, handling and transporting nitrogen trifluoride.
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