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Abbreviation: HFBD

Synonyms: Hexafluorobuta-1,3-diene;hexafluoro-1,3-butadiene;1,1,2,3,4,4-hexafluoro-1,3-butadiene;1,1,2,3,4,4-hexafluoro-buta-1,3-diene;1,1,2,3,4,4-hexafluorobuta-1,3-diene

CAS: 685-63-2

Molecular formula: C4F6

Molecular weight: C4F6

Einecs: 211-681-0

Dangerous goods transport number: UN 3161

Structural formula:hexafluorobutadiene-1,3 formula.png


    Hexafluorobutadiene, also known as perfluorobutadiene, was initially synthesized as a monomer for polymers, but its polymer performance was poor and has not been further studied and applied. In recent years, research on the application of hexafluorobutadiene has mainly focused on its use as an electronic etching gas.hexafluorobutadieneqki


    Analysis Requirement
    Purity(% by weight) 99.995 min
    ppm 20
    ppm 2.5
    at 760 mmHg 18.6±35.0 °C 
    Melting Point (℃) -132ºC
    g/cm3 1.4±0.1 
    Flash Point (℃) -17.2±17.9 °C


    Perfluorobutadiene is a colorless, odorless, non-toxic gas that has the following uses:
    1. Coating materials: Due to its low surface tension and chemical stability, perfluorobutadiene is widely used in coating materials to provide waterproof, corrosion and chemical resistance.
    2. Electronic materials: Perfluorobutadiene can be used to prepare optoelectronic materials, capacitors, lubricants, etc.
    3. Drug delivery system: Perfluorobutadiene can be used as a carrier for drugs to improve drug absorption efficiency by controlling the release rate.


    1. Avoid direct contact: Perfluorobutadiene may cause skin and eye irritation, direct contact should be avoided.
    2. Good ventilation: When using perfluorobutadiene, ensure good ventilation to avoid inhaling large amounts of gas.
    3. Avoid burning: Perfluorobutadiene is a flammable gas, avoid contact with open flames or high temperatures.
    4. Storage Note: Perfluorobutadiene should be stored in a cool, dry and well-ventilated place


    1. Packed in cylinder (1ton per cylinder).
    2. Packed in ISOTANK.


    Hexafluoro-1,3-butadiene, code-named C4F6, is a new type of fluorine-containing green electron etching gas. It has the advantages of fast etching rate, high aspect ratio and high selectivity, and can achieve nearly vertical etching. Processing provides the possibility to manufacture small-volume, large-capacity 3D NAND flash memory; at the same time, hexafluorobutadiene is environmentally friendly, with GWP<<1 and atmospheric life of 1.1 days. It is the current fluorine-containing material with excellent etching performance and environmental protection performance. One of the electronic etching gases.


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